Encapsulation (TFE) [1], [2] of a radio-frequency microelectromechanical systems (RF MEMS) device with rerouting of contacts and pads for flip-chip compatibility to a much smaller CMOS chip. This ...

Salicide (self-aligned silicide) technology has been widely used in CMOS (complementary metal-oxide semiconductor) fabrication for several generations, to provide stable Ohmic contacts with low ...