Abstract: Multiple parallel sparse linear arrays (MPSLAs) can be strategically deployed in two-dimensional (2D) or threedimensional (3D) space, offering a unique advantage by enabling easy conformal ...

The process offers the advantages of developing 2D CMUT arrays on glass substrates that do not need to be compatible with anodic bonding.

Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, Anhui, P.R. China *To whom ...

† State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, Nanjing, 210096, P. R. China ‡ Department of Physics, Southeast University, ...